Imago Helps to Map Semiconductor Atoms
September 13, 2007
Using atom-probe tomography to pinpoint arsenic dopant atoms in silicon, researchers from Imago Scientific Instruments and IBM, are now able to understand how the dopant is distributed through the silicon in semiconductors. The mapping shows that dopant atoms form spheroidal clusters around defects in the silicon, drastically affecting the functionality of the devices, especially as the size of the devices continue to decrease into the tens-of-nanometer range. These atomic plots are crucial in understanding how to make silicon transistors even smaller, without impairing electronic performance. Visit www.imago.com to learn more.
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